The top 4 (all exceeding 70 million) are: Waterloo - 84.12m Victoria - 82.25m King's Cross St. Pancras - 77.11m Oxford Circus - 77.09m [busiest station without NR connections]
To the best of my knowledge, the footfall at Waterloo is a record for any LU station. Victoria is particularly impressive with an average of more than 20 million per platform, and KXSP is now within half a million of its 2004 record (boosted then by Thameslink passengers affected by the 8-month blockade between Kentish Town and King's Cross Thameslink).
Regarding 2003-2011 footfall, two stations experiencing particularly fast growth are Canary Wharf and Stratford.
Canary Wharf handled 24.226m in 2003 - five years later, it became 43.51m before falling to 39.616m the following year and in 2011 it handled 46.59m.
Stratford started with 16.179m in 2003, which became 29.82m in 2010. Not as impressive as CW, except that Eastfield opened in September 2011 and the footfall has jumped by more than 18 million to 48.57m (not to mention the station is busiest on Saturdays now).
God knows what the annualised footfall at Stratford is today! (Having said that, CW does have significantly fewer platforms, even if the stats include footfall for its DLR namesake).